住友重機械工業（株）Sumitomo Heavy Industries

Sumitomo Heavy Industries provides innovative products based on lasers, components, and control platforms technology which can be utilized on various aspects of semiconductor manufacturing.

Laser Annealing System for SiEfficient solid laser annealing system corresponding to deep activation and double pulse process

It is a hybrid laser annealer equipped with the solid state green laser and long wave length IR laser that enables the original double-pulse process. Sumitomo promotes the development of the process of the next generation in the semiconductor : high pulse energy stability, precise pulse control, high repetition rates, maintenance free, and compact design.

Laser Annealing System for SiCEfficient solid sate laser annealing system for next generation power devices.

Metal-SiC interface is heated to the high temperature suppressing the temperature rise in non-irradiation side, and generation of the ohmic contact is achieved by the original, high speed laser annealing method.

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