PIEZOSYSTEM JENA GMBH
德国 |
其他
激光器和光导发光元件 | 传感器、测试测量 | 服务 | 激光加工系统 | 生物光子学及医学工程
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https://www.piezosystem.comCharacteristics:
• Highly compact design results in superior performance
• Accurate parallel motion by parallelogram design
• Lowest settling time
• Motion without mechanical play
• High resolution in sub-nm range
• Motion up to 9 µm
• Outside dimensions: 15x15x15 mm³ [0.5906 inch³]
characteristics:
• positioning in millisecond range
• steps in single figure nanometer range
• stable positioning of a few nanometers
• very high repeatability
applications:
• semiconductor and solar industry
• lithography
• display manufacturing
• surface structuring
• surface inspection
• chip verification
• verification of conductive paths
• measurement systems
• quality control
• bonding technology
options:
• vacuum clamping technology
• vacuum version
• active tilt correction
Characteristics:
• 400 µm adjustment range
• nm resolution
• Compact design
• Bidirectional nanoX® gear design
• High resonant frequency
• Easy to fix onto microscopes
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